AMMRF -

FEI Nova Nanolab 200 Dualbeam FIB (UNSW)

Contact: Dr Charlie Kong, Research Associate, Tel: 02 9385 5581.

The University of new South Wales Node
Example image

Preparation of TEM specimen on interface between electrode and electrolyte in a fuel cell, resulting in an ultrathin section across electrode/electrolyte interface.

Capabilities

Advanced microscopy platform comprising high-performance electron and ion columns and analytical detectors for use in 2D and 3D microscopy, materials modification and fabrication of insulators, metals and semiconducting materials.

  • Implantation and nano-machining
  • Quantum Dots and arrays
  • Precise Surface Reconstructions
  • Select chemically regions for machining
  • Alternate between imaging and nanomilling
  • Single atom implantation, device prototyping or selective alloying
Characterisation
  • Nanoscale metrology: characterisation of micro devices (e.g.) recording heads, quantum computer, photonics, semiconductors
  • Engineering materials: new insights
Configuration
  • Dual-beam, featuring a scanning electron microscope
  • Focussed Ga source for ion machining and milling
  • Multi-source
  • Analytical capability (EDXS, EBSD)
  • Ion energy range: 5 – 30 keV
  • Ion beam current range: 1 pA to 20 nA
  • Ion beam min. diameter: approx. 10 nm
  • Electron column energy range: 0.5 – 30 keV
  • Electron column imaging resolution: 1 nm
TOP
Flagship instruments

Cameca NanoSIMS 50 (UWA)

FEI Tecnai F30 High-Throughput CryoTEM (UQ)

Imago Local Electrode Atom Probe & Wide-Field-Of-View Laser Atom Probe (USYD)

FEI Nova Nanolab 200 Dualbeam FIB (UNSW)

Dualbeam FIB/FESEM (Uni Adel)

Coming on-line:

Time-Of-Flight Secondary Ion Mass Spectrometer (Uni SA)

Cameca 1280 Large-Radius Ion Microprobe (UWA)

High-Resolution SEM Analysis Facility (UNSW)