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Glossary terms about Inner shell ionization

Inner shell ionization
Removal of an electron from an inner (K, L or M) electron shell. The atom is in an excited state.

2 pages mention Inner shell ionization

Characteristic X-rays
Note that inner shell ionization and Characteristic X-ray emission can result from irradiation by a primary beam of protons (PIXE) or X-rays (XRF) as well as electrons (EDS/WDS). 
X-ray intensity
Figure: After inner shell ionization, the atom may relax by emitting a Characteristic X-ray or an Auger electron.