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Glossary terms about Precision

Precision
The reproducibility of the analysis based on statistics related to the number of counts in the X-ray spectrum.


2 pages mention Precision

Accuracy, Precision and Detection Limits
precision refers to the reproducibility of the measurement of the X-ray counts in the EDS spectrum. 
Quantitative EDS X-ray microanalysis using SEM
The beam current should be adjusted to minimize damage to the sample but generate sufficient X-rays to allow reliable quantification (see precision and Accuracy and Detection Limits).