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Glossary terms about Depth of focus

Depth of focus
The vertical distance through which the sample can be moved without affecting the sharpness of the image. This will depend on the magnification.

2 pages mention Depth of focus

Beam Adjustment
Sometimes you will need to change the height (z-axis) of your sample (lower for greater depth of focus or to allow tilting; higher for greater resolution) Increase your magnification. 
Electromagnetic lenses, apertures and beam size
A smaller aperture is chosen for high resolution work and better depth of focus