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Glossary terms about Electron Backscatter Diffraction

Electron Backscatter Diffraction (EBSD )
An electron microscope technique used for viewing crystallographic information based on backscattered electrons whose scattering efficiency depends on the crystallographic orientaiton of the specimen. See

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Electron-beam lithography (E-beam lithography or EBL)
There are also the microanalysis techniques associated with SEM: Spectroscopy for analysing the elemental make up of samples, electron backscatter diffraction (EBSD) for viewing crystallographic information, and Cathodoluminescence (CL) for imaging otherwise invisible microstructural defects and impurities in semiconductors and insulating materials. 
Images from electrons
X-ray element distribution map Aluminium, calcium and iron ooids. (Elemental information.) electron backscatter diffraction (EBSD) map An orientation map of a quartz clast in a pseudotachylite (earthquake rock) showing recrystallisation around the outer edge.