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Glossary terms about Working Distance

Working Distance (WD)
The distance from the underside of the objective lens to the surface of the specimen.


3 pages mention Working Distance

Role of sample height
Sample height, or working distance (WD), refers to the distance between the bottom of the SEM column and the top of the sample. 
Spot size
Images taken at the same magnification, kV, and working distance but using different spot sizes show these affects. 
Troubleshooting: edge effect, charging, sample damage
Increasing the working distance can also help since it produces a larger spot size on the sample for the same beam energy but this has the disadvantage of reducing resolution.