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Glossary terms about Inelastic scattering

Inelastic scattering
Electron scattering in which the electron looses energy through interaction with the sample. Inelastic scattering is considered to produce secondary electrons. Note that not all inelastic events produce secondary electrons e.g. Bremsstrahlung is an inelastic event that produces no secondary electrons.

7 pages mention Inelastic scattering

Electron-matter interactions
The result is generation of backscattered electrons (BSE). inelastic scattering– the incident electron trajectory is only slightly perturbed, but energy is lost through the transfer of energy to the specimen. 
Generating an image
Secondary electrons are low energy electrons formed by inelastic scattering and have energy of less than 50eV. 
Risk assessment example: transport and analysis of a SEM sample
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