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Glossary terms about Interaction volume

Interaction volume
The volume of the sample in which electrons from the primary electron beam spread out and interact with the atoms of the sample. The size of the interaction volume depends upon the energy of the electron beam and the average density of the sample.

4 pages mention Interaction volume

Acceleration voltage vs. specimen type
With a higher accelerating voltage the electron beam penetration is greater and the interaction volume is larger. 
Electron-matter interactions
This shape is called an interaction volume and its depth and diameter depends on the kV as well as the density of the specimen. 
Generating an image
The greater energy of BSE, compared with SE, means that BSE produced from deeper within the interaction volume are able to escape from the sample and be collected by the BSE detector, so BSE images have lower spatial resolution than SE images. 
Sample preparation