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Glossary terms about Microanalysis

Microanalysis
A technique to analyse composition in regions of a sample in the micron and nano ranges. Techniques include spectroscopy (Energy Dispersive or Wavelength dispersive), Electron Backscatter Diffraction, and Cathodoluminescence


6 pages mention Microanalysis

Applications and practical uses - what the SEM can do
View frozen material (in an SEM with a cryostage) Generate X-rays from samples for microanalysis (EDS; WDS) to determine chemical composition. 
Electron-beam lithography (E-beam lithography or EBL)
There are also the microanalysis techniques associated with SEM: Spectroscopy for analysing the elemental make up of samples, Electron Backscatter Diffraction (EBSD) for viewing crystallographic information, and Cathodoluminescence (CL) for imaging otherwise invisible microstructural defects and impurities in semiconductors and insulating materials. 
Generating an image
As a general rule, differences in elemental composition or concentrations that can be observed clearly by BSE imaging can successfully be assessed with microanalysis using energy dispersive  
Recommended reading
(ed). Electron microscopy and microanalysis of crystalline materials. 
Sample preparation
 
Spot size