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Glossary terms about Scan coils

Scan coils
Coils within the objective lens that drive the beam off-axis and back again. Two sets of coils are used to deflect the beam in the x and y directions.


3 pages mention Scan coils

Layout
The scanning system uses two pairs of electromagnetic deflection coils (scan coils) that scan the beam along a line then displace the line position to the next scan so that a rectangular raster is generated both on the specimen and on the viewing screen. 
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