Cameca NanoSIMS 50 Ion Probe
Contact
Centre for Microscopy, Characterisation and Analysis, The University of Western Australia
Assist/Prof Matt Kilburn, NanoSIMS Manager
Tel: 08 6488 8068
Email: matt.kilburn@uwa.edu.au
Capabilities
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Configuration
- Ion probe for ultra-fine feature analysis
- Cs+ or O- primary ion beam
- High lateral resolution
• Sub-50 nm for Cs+
• Sub-150 nm for O- - Simultaneous collection of five ionic species
- High mass resolution, high sensitivity, high transmission
- Charge compensation for insulating samples
Example image
Clockwise from top left: |
FOV = 30 µm. |







